| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique for precisely measuring the shape of a workpiece, even when a holder which is used for positioning the work with respect to a position measuring apparatus is the holder which may give rise to a positional deviation. SOLUTION: The relative positional relationship of a reference of the holder for positioning the workpiece is obtained in advance. The position measuring apparatus measures the position of the holder and a part of the workpiece to be measured, with respect to its own coordinate system. An apparatus which transforms the measurement result of the position of the workpiece positioned with respect to the holder into a coordinate value of the workpiece coordinate system defined in the workpiece is provided, on the basis of the measurement result of the position measuring apparatus and the relative positional relationship of the positioning reference of the holder, and the measurement result of the position precisely indicating the shape of the workpiece itself is obtained by the coordinate transformation. COPYRIGHT: (C)2005,JPO&NCIPI
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