EQUIPMENT FOR SUPPLYING AND RECOVERING ELECTROLYTE AND APPARATUS FOR REPLENISHING LIQUID COMPONENT

摘要

PROBLEM TO BE SOLVED: To efficiently supply and recover an electrolyte while realizing cost reduction by improving the production efficiency in response to an increased output. SOLUTION: Equipment 40 for supplying and recovering the electrolyte supplies the electrolyte to an electrolytic treatment device 12 and recovers the electrolyte from the device 12. The equipment is equipped with a new liquid-supplying part 42 and a drainage-recovering part 44. The new-liquid-supplying part 42 pools a new electrolyte, which has been stored inside a carry-in vessel 32 carried in from outside and transferred from the carry-in vessel 32, and supplies it to the electrolytic treatment device 12. The drainage-recovery part 44 pools the electrolyte recovered from the electrolytic treatment device 12 and transfers it to a carry-out vessel 34 which is subsequently carried out. COPYRIGHT: (C)2005,JPO&NCIPI