| 摘要 |
PROBLEM TO BE SOLVED: To provide a single plate coating apparatus in which coating quality by high seed coating is secured and the productivity is improved by moving a large and heavy coating table and a double-housing type coating head in a direction opposite to each other on the same axis to make the relative moving speed obtained by adding both moving speeds into a coating speed and suppress the moving speed of each of the coating table and the coating head itself to reduce the acceleration zone and the deceleration zone to become an unstable zone for a coating film thickness. SOLUTION: This coating apparatus is provided with the horizontally movable horizontal coating table 11 on which a single plate 1 is horizontally placed, a horizontal movement controllable coating head unit 21, the coating head 22 attached to the coating unit 21, a coating liquid supply part 24 for supplying a coating liquid to the coating unit 22, a height control part 23 for controlling the height distance between the coating table 11 and the coating head 22, and a single plate thickness measurement part 25. Horizontal movement direction of the coating table 11 and the coating head 22 is the direction opposite to each other on the same axis, and the coating liquid is applied on the surface of the single plate 1. COPYRIGHT: (C)2005,JPO&NCIPI
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