发明名称 |
Table device, film-forming apparatus, optical element, semiconductor element, and electric apparatus |
摘要 |
A table device for chucking a substrate includes a chucking unit including a porous body, and having a substrate chucking surface, and a conductive film which is disposed on the substrate chucking surface of the chucking unit, and which is grounded.
|
申请公布号 |
US2004246309(A1) |
申请公布日期 |
2004.12.09 |
申请号 |
US20040818456 |
申请日期 |
2004.04.05 |
申请人 |
WATANABE NOBUKO |
发明人 |
WATANABE NOBUKO |
分类号 |
B23Q3/08;B41J2/175;H01L51/50;H05B33/10;H05B33/12;(IPC1-7):B41J2/06 |
主分类号 |
B23Q3/08 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|