发明名称 LEAK RATE MEASURING DEVICE
摘要 The leak rate measuring device contains a strip spectrometer (8) in which the ion path (21) of the respective gas is influenced by at least one variable influencing quantity. Should a gas of mass M4 be detected, and leakages of the gas of masses M2 or M3 interfere with this detection due to a lack of selectivity of the spectrometer, the invention provides that the influencing quantity is modulated in a sinusoidal manner, and the wanted signal is subsequently selected in a lock-in amplifier. This enables the elimination of the interfering influence of underground water during the leak rate measurement while using helium as a test gas.
申请公布号 WO2004106881(A2) 申请公布日期 2004.12.09
申请号 WO2004EP04949 申请日期 2004.05.10
申请人 INFICON GMBH;GERDAU, LUDOLF;ROLFF, RANDOLF;KILIAN, RALF 发明人 GERDAU, LUDOLF;ROLFF, RANDOLF;KILIAN, RALF
分类号 G01M3/20;H01J49/28 主分类号 G01M3/20
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