| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To enectrically connect an inside and an outside of a chamber in a narrow pitch, of an electric connection system electrically interconnecting the inside and the outside of the vacuum chamber. <P>SOLUTION: The electric connection system comprises via-holes 134 in which conductors are filled and both connected to the conductors; an insulating first substrate 13 having conductive pads 113a, 113b spreading on surfaces of both inside and outside of the chamber both connected to the conductor, and blocking holes formed on a barrier; a second base plate having a conductive layer on its whole surface; an inner wiring 22 of the chamber soldered to one end of the conductive layer; first connectors 20A soldered to the other end of the conductive layer, having a spring contact 23 press contacted to the conductive pad 133a spreading on the inside surface of the chamber at the first substrate 13; and second connectors 20B having the same structure with the first connectors 20, arranged at the outside of the chamber. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
