| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for reclaiming a test substrate that has been used for testing a semiconductor manufacturing tool. SOLUTION: The test substrate is reclaimed by reading process steps carried out on respective test substrates from a database, and selecting one reusable process from a plurality of reusable processes. Information for identifying the processes carried out on respective test substrates and reusable processes selected for respective test substrates is stored in a history database of the test substrates. Each of the test substrates is classified and allocated to a test substrates group having a common reusable process assigned to the test substrates group. Large containers that stores the classified test substrates are labeled by identification information including basic or detailed information on the reusable processes selected for the test substrates stored in the large containers, respectively. COPYRIGHT: (C)2005,JPO&NCIPI
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