Fe-Co-B ALLOY TARGET MATERIAL, ITS MANUFACTURING METHOD, SOFT MAGNETIC FILM, MAGNETIC RECORDING MEDIUM AND TMR ELEMENT

摘要

PROBLEM TO BE SOLVED: To reduce the magnetic permeability of an Fe-Co-B alloy target material for depositing a soft magnetic film used for a perpendicular magnetic recording medium, a TMR element, etc., and to provide the Fe-Co-B alloy target material having excellent sputtering characteristics.

SOLUTION: In the Fe-Co-B alloy target material, the diameter of a maximum incircle which can be drawn in a region free from boride phase in a cross-sectional microstructure is made to ≤30μm. Further, the Fe-Co-B alloy target material has a composition represented by composition formula (FeXCo100-X)100-YBY(where 5≤X≤95 and 5≤Y≤30 are satisfied) in atomic ratio.

COPYRIGHT: (C)2005,JPO&NCIPI