发明名称 Damped control of a micromechanical device
摘要 Device and method for a damping function to reduce undesirable mechanical transient responses to control signals. In one aspect of the present invention, the damping function may be used to reduce overshoot and oscillation when a digital micromirror is driven from a landing plate to the flat or neutral position. In another aspect of the present invention, the damping function may be used to reduce transient resonance of a digital micromirror when the micromirror is driven to a landing plate.
申请公布号 US2004246554(A1) 申请公布日期 2004.12.09
申请号 US20030749432 申请日期 2003.12.31
申请人 KAERIYAMA TOSHIYUKI 发明人 KAERIYAMA TOSHIYUKI
分类号 G02B26/08;(IPC1-7):G02B26/08 主分类号 G02B26/08
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