| 摘要 |
<p>PCT No. PCT/SE96/00308 Sec. 371 Date Dec. 30, 1997 Sec. 102(e) Date Dec. 30, 1997 PCT Filed Mar. 8, 1996 PCT Pub. No. WO96/28841 PCT Pub. Date Sep. 19, 1996The invention relates to a method for manufacturing a micromachined structure to be at least partly released from a substrate surface. A surface contact area, over which structure and the said substrate surface are in surface contact with each other during the manufacturing step, is divided into at least a first and a second contact zone, the adhesiveness between the structure and the substrate being greater in the first contact zone than in the second contact zone. As a manufacturing step, or as a step subsequent to the manufacturing, the structure can be released from the substrate surface at least over said second contact zone. The completed structure may also be completely loose from the substrate. The invention is also directed to a micromachined structure manufactured according to the method.</p> |
