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发明名称
METHOD AND APPARATUS FOR INTEGRATED CHEMICAL MECHANICAL POLISHING OF COPPER AND BARRIER LAYERS
摘要
申请公布号
EP1483785(A1)
申请公布日期
2004.12.08
申请号
EP20030720656
申请日期
2003.03.13
申请人
NUTOOL, INC.
发明人
TALIEH, HOMAYOUN;BROWNE, ROBIN, F.;BASON, BULENT;YOUNG, DOUGLAS;WANG, YUCHUN;TRUONG, TUAN
分类号
B24B21/04;B24B37/04;B24B49/16;H01L21/321;(IPC1-7):H01L21/321
主分类号
B24B21/04
代理机构
代理人
主权项
地址
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