发明名称 MASK PLATE
摘要 <p>PROBLEM TO BE SOLVED: To reduce mask positioning pawls, to eliminate a holding mechanism at the time of transportation, to eliminate a trouble for correspondingly and individually generating/dividing mask plates at the time of changing a mask size and to detect a mask by providing notch parts at the opposite angle parts of the base plate. SOLUTION: Mask mounting parts 2 fitted to the base plate 1 with bolts 3 and the notch parts 4 of the base plate 1 are provided. Furthermore, positioning holes 7 and 8 and the positioning notches 9, which are provided for the base plate 1, are provided. Namely, the notch parts 4 are provided at the opposite angle parts of the base plate 1. Thus, the number of the mask positioning pawls can be reduced, the mask plate holding mechanism becomes unnecessary and a highly precise system can be obtained.</p>
申请公布号 JPH09260477(A) 申请公布日期 1997.10.03
申请号 JP19960063113 申请日期 1996.03.19
申请人 MITSUBISHI ELECTRIC CORP 发明人 ITOU SUKENORI
分类号 H01L21/673;G03F7/20;H01L21/027;(IPC1-7):H01L21/68 主分类号 H01L21/673
代理机构 代理人
主权项
地址
您可能感兴趣的专利