| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an electron emitting element in which an emitter is easily and uniformly formed without utilizing anisotropic deposition, particularly distribution factor is high, insulation failure is null, and performance is high. SOLUTION: A substrate, an emitter wiring layer 2, an insulation layer 4, and a gate electrode 5 are successively laminated, an opening portion A reaching the emitter wiring layer 2 is provided in the gate electrode 5 and the insulation layer 4, and on the emitter wiring layer 2 in the opening portion A, an emitter 3 is formed so as not to touch the gate electrode 5 so that an electric field emitting type electron emitting element is provided. The emitter 3 has a shape of either truncated cone or truncated polygonal pyramid whose bottom face is positioned on an emitter wiring, and the top face of the emitter 3 is a flat surface so as to be the electron emitting element.</p> |
