| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an ultra-precise positioning device whereby long stroke driving is possible and also positioning with high rigidity and high precision is executed. SOLUTION: A series of operations that a travelling body 1 is held between one of clamp elements 14a-14c so as to be carried by extending carrying elements 13a-13c and the carrying elements 13a-13c are contracted after the release of holding are repeated at every carrying unit 1-3. When the travelling object 1 reaches a travelling target position, the clamp elements 14a-14c are alternately extended and contracted while the travelling body 1 is kept to be still. Then, the carrying positions of the carrying elements 13a-13c are simultaneously set to the intermediate position of extending/contracting span. After that, the clamp elements 14a-14c are made to be in a holding state. After the completion of holding, the feed-back control of the position as against the carrying elements 13a-13c is executed based on a position signal which is detected by a position sensor.</p> |
