发明名称 LASER PROCESSING APPARATUS USING POLYGON MIRROR TO IMPROVE SAWING EFFICIENCY
摘要 <p>PURPOSE: A laser processing apparatus using a polygon mirror is provided to improve cutting efficiency by eliminating the necessity of an additional replacement process of equipment and by performing a cutting process while using only laser. CONSTITUTION: A laser generation unit generates and outputs laser. A polygon mirror(10) includes a plurality of reflection surfaces(12), rotating with respect to an axis. The polygon mirror reflects the laser that is generated from the laser generation unit and is incident upon the reflection surface. A lens(20) collects the laser light reflected from the polygon mirror to irradiate the laser light to an object to be processed.</p>
申请公布号 KR100462358(B1) 申请公布日期 2004.12.08
申请号 KR20040022270 申请日期 2004.03.31
申请人 EO TECHNICS CO., LTD. 发明人 HAN, YOU HIE
分类号 G02B26/12;B23K26/04;B23K26/06;B23K26/073;B23K26/08;B23K26/38;B23K26/40;G02B26/08;G02B26/10;H01L21/304;H01L21/78;H01S3/00;(IPC1-7):H01L21/78 主分类号 G02B26/12
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