,申请号JP19990052889-传众专利搜索

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发明名称
摘要
申请公布号	JP3597726(B2)	申请公布日期	2004.12.08
申请号	JP19990052889	申请日期	1999.03.01
申请人		发明人
分类号	H01L21/60;G05D3/12;(IPC1-7):H01L21/60	主分类号	H01L21/60
代理机构		代理人
主权项
地址

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