| 摘要 |
PURPOSE: An apparatus and a method for transferring a substrate and an apparatus for a vacuum treatment are provided to transfer a large sized substrate without bend of the substrate by supporting both the edge portion and the inside portion of the substrate. CONSTITUTION: An apparatus for transferring a substrate comprises a substrate transfer unit(70) and a substrate exchange unit(80). The substrate transfer unit transfers a substrate(G) between the first room(20) and the second room(10). The substrate exchange unit has the first support elements(81,82) for supporting the edge of the substrate and the second support element(85) for supporting the inside of the substrate. The substrate exchange is installed in the first room, where the substrate exchange unit performs the exchange of the substrate between the substrate transfer unit and an another substrate transfer unit.
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