SEMICONDUCTOR SUBSTRATE SUPPORT HOLDER WITH PADS HOLDING SEMICONDUCTOR SUBSTRATE

摘要

PURPOSE: A semiconductor substrate support holder is provided to reduce particle generation and static electricity by preventing friction with a semiconductor substrate using pads holding the semiconductor substrate. CONSTITUTION: A semiconductor substrate supporting holder comprises a circle plate(110) for loading a semiconductor substrate, a guide unit(120) extending upward along the edge of the circle plate, and a plurality of pads(130) protruding from the upper surface of the circle plate. The guide unit leads the semiconductor substrate to the center of the circle plate in the process of loading of the semiconductor substrate. The plurality of pads make the semiconductor substrate apart from the upper surface of the circle plate.