| 摘要 |
PROBLEM TO BE SOLVED: To provide an angular velocity sensor whose sensitivity does not depend on the direction of a vibration and whose detecting sensitivity is enhanced. SOLUTION: An angular velocity sensor 1 is provided with a vibrator 2 which is formed to be a pillar-shaped body and whose cross-sectional shape is nearly T-shaped, with a piezoelectric element 3, for drive, which is attached to the side face of the vibrator 2 and which excites the vibrator 2 to a prescribed direction and with one pair of piezoelectric elements 4A, for detection, which are attached to side faces of the vibrator 2 and which detect the rotation of the vibrator 2. In the angular velocity sensor 1, the piezoelectric elements 4A for detection are arranged nearly perpendicularly to the Coriolis force generated in the vibrator 2. |
