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发明名称
Removing a condensable constituent from a gas flow
摘要
申请公布号
GB2374299(B)
申请公布日期
2004.12.08
申请号
GB20020019310
申请日期
2001.01.19
申请人
* MKS INSTRUMENTS,INC.
发明人
YOUFAN * GU
分类号
B01D53/68;B01D5/00;B01D8/00;B01D53/46;C23C16/44;H01L21/31;(IPC1-7):B01D8/00
主分类号
B01D53/68
代理机构
代理人
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