发明名称 |
Capacitive micro sensor, gyroscope, and input device |
摘要 |
The invention provides a capacitive micro sensor that suppresses electric noises generated around the electrodes and enhances the S/N ratio to thereby enhance the detection sensitivity. The gyroscope of the invention includes a tuning fork (6) having three legs (9), driving electrodes (4) and detecting electrodes (5) provided on two glass substrates (2, 3), driving fields-through (7) that supply the driving electrodes with a drive signal, and detecting fields-through (8) that extract a detecting signal from the detecting electrodes. There is also provided a shield member between the detecting and the driving, shield members between the detecting and the detecting, and shield members between the driving and the driving are provided, which makes electrostatic shielding between the adjacent fields-through of the areas where the driving fields-through and the detecting fields-through are arrayed. <IMAGE> |
申请公布号 |
EP1118836(A3) |
申请公布日期 |
2004.12.08 |
申请号 |
EP20000310972 |
申请日期 |
2000.12.08 |
申请人 |
ALPS ELECTRIC CO., LTD.;ESASHI, MASAYOSHI |
发明人 |
ABE, MUNEMITSU;SHINOHARA, EIJI;ESASHI, MASAYOSHI |
分类号 |
G01P9/04;G01C19/08;G01C19/56 |
主分类号 |
G01P9/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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