COATING DEVICE TO FORM PHOTOSENSITIVE COAT IN STABLE AND EFFECTIVE WAY

摘要

PURPOSE: A coating device is provided to form a photosensitive coat in stable way and to improve the coatability with reduced amount of a photosensitive liquid, by using a separately formed solvent discharging part. CONSTITUTION: The coating device comprises: a supporting plate where a substrate is mounted; a nozzle which applies a photosensitive liquid(20) to the substrate; a photosensitive liquid feeder to supply the photosensitive liquid to the nozzle; a solvent feeder to supply a solvent(40) to the nozzle(200); and a device for moving the nozzle and the substrate relatively, wherein the nozzle has a photosensitive liquid discharging part(220) and a solvent discharging part(240), which are separately formed. The photosensitive liquid discharging part comprises a photosensitive liquid supply pipe(221), a tank(222) for storing the photosensitive liquid, a flow channel(224), and a silt part(225) for the liquid, and the solvent discharging part comprises a solvent supply pipe(241), a tank(242) for storing the solvent, a flow channel(244) for the solvent, a slit part(245) for the solvent.