| 发明名称 |
SYSTEM FOR LOADING, PROCESSING AND UNLOADING SUBSTRATES ARRANGED ON A CARRIER |
| 摘要 |
Reactor, such as an oven, which is provided with a door plate in/on which a carrier, for example semiconductor substrates, can be placed. This carrier is arranged in a rotating manner. Door plate/carrier forms a unit which is separate from the rotary drive, so that door plate and carrier provided with wafers can be removed from the oven and conveyed further, after which a further door plate provided with a carrier can be arranged on the oven.
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| 申请公布号 |
WO9838672(A1) |
申请公布日期 |
1998.09.03 |
| 申请号 |
WO1998NL00105 |
申请日期 |
1998.02.23 |
| 申请人 |
ASM INTERNATIONAL N.V.;DE RIDDER, CHRISTIANUS, GERARDUS, MARIA |
发明人 |
DE RIDDER, CHRISTIANUS, GERARDUS, MARIA |
| 分类号 |
H01L21/673;B65G49/07;H01L21/00;H01L21/22;H01L21/683;(IPC1-7):H01L21/00 |
主分类号 |
H01L21/673 |
| 代理机构 |
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代理人 |
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