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发明名称
摘要
申请公布号	JP3599500(B2)	申请公布日期	2004.12.08
申请号	JP19960283691	申请日期	1996.10.25
申请人		发明人
分类号	H01L21/8247;B82B1/00;H01L27/10;H01L29/66;H01L29/788;H01L29/792;(IPC1-7):H01L27/10;H01L21/824	主分类号	H01L21/8247
代理机构		代理人
主权项
地址

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