LASER DEVICE CAPABLE OF EMITTING LASER LIGHT HAVING HIGH BRIGHTNESS, ESPECIALLY INCLUDING A PLURALITY OF A PLURALITY OF LASER MODULES HAVING CONDENSING OPTICAL SYSTEMS

摘要

PURPOSE: A laser device is provided to emit a laser light of high brightness, so improving an accuracy of an exposure apparatuses. CONSTITUTION: A laser device includes a laser elements, an optical fiber(30), a plurality of laser modules(64), and a laser emitting portion(68). Each of the optical fibers includes a cladding(30B) surrounding a core(30A). The laser module a condensing optical systems which focus a laser beam from the laser elements and guides it to incidence ends of the optical fibers. The laser emitting portion arranges emitting ends of the optical fibers as a bundle to output one output beam. In mathematical formula, h is thickness of the cladding, w is emission light amount of one laser module, c is required intensity and p is packing ratio, and t is core diameter.