发明名称 |
Resonator with seed layer |
摘要 |
A thin-film resonator having a seed layer and a method of making the same are disclosed. The resonator is fabricated having a seed layer to assist in the fabrication of high quality piezoelectric layer for the resoantor. The resonator has the seed layer, a bottom electrode, piezoelectric layer, and a top electrode. The seed layer is often the same material as the piezoelectric layer such as Aluminum Nitride (AlN).
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申请公布号 |
US6828713(B2) |
申请公布日期 |
2004.12.07 |
申请号 |
US20020209624 |
申请日期 |
2002.07.30 |
申请人 |
AGILENT TECHNOLOGIES, INC |
发明人 |
BRADLEY PAUL D.;LEE DONALD;FIGUEREDO DOMINGO A. |
分类号 |
H03H3/02;H03H9/02;H03H9/17;H03H9/54;(IPC1-7):H01L41/08 |
主分类号 |
H03H3/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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