发明名称 |
Apparatus for detecting the oscillation amplitude of an oscillating object |
摘要 |
Apparatus for detecting the oscillation amplitude of an oscillating object (3) includes an optical radiation source (9) and a detector (10) including first and second optical radiation sensing areas (24A, 24B) adjacent each other. The detector (10) and the optical radiation source (9) are adapted to be located opposite each other with the oscillating object (3) located between the source (9) and the detector (10) so that the object (3) blocks a portion of the sensing areas (24A, 24B) from receiving optical radiation from the source (9). A processor (18) coupled to the detector (10) receives first and second output signals representing the magnitude of optical radiation sensed by the first and second optical radiation sensing areas (24A, 24B), respectively. The processor (18) processes the first and second output signals to obtain an indication of the amplitude of oscillation of the object (3). |
申请公布号 |
US6827247(B1) |
申请公布日期 |
2004.12.07 |
申请号 |
US20010913014 |
申请日期 |
2001.08.08 |
申请人 |
ASM TECHNOLOGY SINGAPORE PTE LTD. |
发明人 |
FAN LIMING;NG HON YU PETER;ZHU XIANBIN;WONG YAM MO;SONG KENG YEW |
分类号 |
B23K20/10;(IPC1-7):B23K5/20;B23K20/08;B23K1/06;B23K31/12 |
主分类号 |
B23K20/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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