| 发明名称 |
A polishing composition including an inhibitor of tungsten etching |
| 摘要 |
A chemical mechanical polishing composition and slurry comprising a composition capable of etching tungsten and at least one inhibitor of tungsten etching and methods for using the composition and slurry to polish tungsten containing substrates. |
| 申请公布号 |
AU8595498(A) |
申请公布日期 |
1999.02.16 |
| 申请号 |
AU19980085954 |
申请日期 |
1998.07.27 |
| 申请人 |
CABOT CORPORATION |
发明人 |
STEVEN K. GRUMBINE;CHRISTOPHER C. STREINZ;ERIC W. G. HOGLUND |
| 分类号 |
B24B37/00;C09G1/02;C09K3/14;C09K13/04;C09K15/20;C23F3/00;H01L21/304;H01L21/306;H01L21/321 |
主分类号 |
B24B37/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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