| 摘要 |
An optical displacement measurement apparatus increasing the valid light receiving area struck by light so as to give a larger signal and reducing the effect of any unevenness or spottiness of the illuminance of the light source or any scratches or dirt on the glass scale is provided. The apparatus has a plurality of light receiving element arrays having a plurality of light receiving elements, has a plurality of light receiving element groups having a plurality of light receiving element arrays, has the plurality of light receiving element arrays arranged shifted by predetermined distances in the direction of movement of the glass scale, and has the light receiving element groups arranged shifted by predetermined distances with respect to the direction of movement of the glass scale. At this time, it is possible to make the width of the valid light receiving portions larger than the width of the invalid light receiving portions, provide one or more light receiving element arrays having a plurality of light receiving elements, and provide a plurality of light receiving element groups having a plurality of light receiving element arrays.
|
