| 摘要 |
PURPOSE: An optical modulator element is provided to dispose a driving ribbon on the same plane as a substrate, in order to realize structural stability, thereby increasing a manufacturing yield as easily producing in large quantities and freely controlling an interval between a ground plate and the driving ribbon by using a spacer. CONSTITUTION: A driving plate(210) has a light entrance hole(221) formed by piercing through a substrate(211). Both ends of a fixing ribbon are fixed to the driving plate(210), and the fixing ribbon consists of a reflective film for reflecting light incident through the light entrance hole(221). Both ends of a driving ribbon are fixed to the driving plate(210), and the driving ribbon is spaced from the fixing ribbon and comprises a conductive film and a reflective film. A driving ribbon electrode pad is connected to the driving ribbon in order to give power to the conductive film. An electrode plate(251) is spaced on an upper end of the driving ribbon and the fixing ribbon. A ground plate(250) has an electrode(252) for applying power to the electrode plate(251). A spacer(254) is installed to maintain an interval between the driving plate(210) and the ground plate(250).
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