发明名称 DROPLET DISCHARGING APPARATUS, ELECTRO-OPTICAL DEVICE PRODUCTION METHOD, ELECTRO-OPTICAL DEVICE, AND ELECTRONIC DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a droplet discharging apparatus which can do the drawing treatment of a work precisely and promptly without making the constitution of the apparatus complex, an electro-optical device production method, an electro-optical device, and an electronic device. SOLUTION: The droplet discharging apparatus 1 is composed of a set table 63, a main scanning means 21 sending the work W relatively in the main scanning direction through the set table 63, a linear scale 203, and a linear sensor 205 and has a linear encoder 202 continuously detecting the moving position of the work W and a control means 5 controlling the main scanning means 21 and a functional liquid discharging head 32 based on the positional information of the linear encoder 202. The linear sensor 205 is mounted on a head unit 13. The linear scale 203 is located between the set table 63 and the work W and attached to a scale mask 211 of a thermal expansion coefficient equal to that of the work W. COPYRIGHT: (C)2005,JPO&NCIPI
申请公布号 JP2004337728(A) 申请公布日期 2004.12.02
申请号 JP20030136482 申请日期 2003.05.14
申请人 SEIKO EPSON CORP 发明人 MIZUTANI SEIGO
分类号 B41J2/01;B05C5/00;B05C11/10;G09F9/30;H01L51/50;H05B33/10;H05B33/14;(IPC1-7):B05C5/00 主分类号 B41J2/01
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