| 摘要 |
PROBLEM TO BE SOLVED: To provide an XY probe having a simple structure suitable for detecting a flaw on a step part forming a recessed part of a work where different diameter parts are coaxially continued, especially a flaw generated in the circumferential direction. SOLUTION: The first and second detection coils are wound in the tip concentration winding state on each tip part of two bar-shaped yokes having a sectional shape having a long axis and a short axis, for example, an approximately rectangular sectional shape, and the two yokes on which each detection coil is wound respectively are provided laterally in parallel in the long axis direction. In addition, an excitation coil is wound in the tip concentration winding state on top of the first and second detection coils on the tip parts of the two yokes. COPYRIGHT: (C)2005,JPO&NCIPI
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