| 摘要 |
PROBLEM TO BE SOLVED: To reduce force transmitted to a support substrate when a probe and a body to be inspected are pressed. SOLUTION: An electrical connection apparatus comprises the support substrate having a plurality of tester lands on the upper surface and a plurality of first connection lands connected to the tester lands each on the lower surface; a mounted substrate that is the mounted substrate having a plurality of second connection lands corresponding to the first connection land each on the upper surface, and a plurality of probe seats connected to the second connection land each on the lower surface, and is arranged at the lower side of the support substrate; a plurality of probe-like connection elements that are mounted to one of the first and second connection lands in a cantilever shape each and are in contact with the other; and a plurality of probes that are mounted to the probe seats in a cantilever shape each. COPYRIGHT: (C)2005,JPO&NCIPI
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