| 摘要 |
There is provided a surface treatment apparatus with atmospheric pressure plasma. The surface treatment apparatus is comprised of a processing gas storage part and a plasma generating part located below the processing gas storage part in which a) the processing gas storage part comprises a first inlet port through which a processing gas is introduced, and b) the plasma generating part comprising an upper electrode and a lower electrode facing each other, a plasma generating space formed between the electrodes, at least one dielectric insulating the upper electrode and the lower electrode, a radiator lowering the surface temperature of the electrode, a second inlet port through which the processing gas is introduced from the processing gas storage part into the plasma generating space, an outlet port through which a plasma and the processing gas which has not been converted into the plasma are driven to outside of the plasma generating space, and an alternating current supply applying an alternating current voltage, wherein both the upper electrode and the lower electrode are flat-panel electrodes, the outlet port is formed on the lower electrode, and a substrate is located below the lower electrode. The apparatus is not limited to a shape of the substrate, and makes it possible to widen effective processing area of the substrate as well as to perform consecutive processes under atmospheric pressure. |
