| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing device of an epoch-making flat panel display which can solve various problems such as high cost by the use of a conventional mask since it enables to form a desired pattern without the mask by performing treatment in each treatment chamber as well as a series of laser work in each laser work chamber through a transfer chamber without using a metal mask for directly contacting a substrate. SOLUTION: This flat panel display manufacturing device is composed of one or a plurality of types of treatment chambers such as a preparation chamber, a plasma cleaning chamber, an organic film forming chamber, a sputter chamber, a CVD chamber, a metal electrode vapor deposition chamber, a can sealing chamber, and a film sealing chamber, and a transfer chamber for transferring a substrate to each chamber. At least either one or more treatment chambers out of the vapor deposition chamber, sputter chamber, CVD chamber, can sealing chamber, and film sealing chamber and one or a plurality of laser work chambers which carry out a process of forming into a desired pattern or removing an unnecessary portion by laser work without using a metal shadow mask for directly contacting the substrate are provided so as to perform the series of treatment work through the transfer chamber, and the treatment chambers and the laser work chambers are integrally structured. COPYRIGHT: (C)2005,JPO&NCIPI
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