发明名称 Semiconductor structure having low resistance and method of manufacturing same
摘要 Embodiments of the present invention include semiconductor devices that can be made with relatively low resistance, and methods of forming such devices. Between forming a polysilicon layer and a metal layer, an interface reaction preventing layer is created. This reaction preventing layer prevents a buildup of highly resistive materials that would otherwise occur when creating conventional semiconductor devices, as well as having other functions.
申请公布号 US2004238876(A1) 申请公布日期 2004.12.02
申请号 US20030448534 申请日期 2003.05.29
申请人 YOUN SUNPIL;HEO SEONG-JUN;KIM SUNG-MAN;LEE CHANG-WON;KU JA-HUM;CHOI SIYOUNG 发明人 YOUN SUNPIL;HEO SEONG-JUN;KIM SUNG-MAN;LEE CHANG-WON;KU JA-HUM;CHOI SIYOUNG
分类号 H01L21/28;H01L21/768;H01L29/49;H01L29/78;(IPC1-7):H01L29/788 主分类号 H01L21/28
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