| 发明名称 |
PIEZOELECTRIC DEVICE , ITS MANUFACTURING METHOD, AND TOUCH PANEL DEVICE |
| 摘要 |
<p>A piezoelectric device (X) comprises a substrate (11), a piezoelectric film (12), a first electrode (13), and a second electrode (14). The first electrode (14) and/or the second electrode (13) is interposed between the substrate (11) and the piezoelectric film (12) and is an A1 alloy containing 0.1 to 0.3 wt% of a metal which is selected from a group of Ti, Cr, Ni, Cu, Zn, Pd, Ag, Hf, W, Pt, and Au.</p> |
| 申请公布号 |
WO2004105148(A1) |
申请公布日期 |
2004.12.02 |
| 申请号 |
WO2003JP06425 |
申请日期 |
2003.05.22 |
| 申请人 |
FUJITSU LIMITED;KATSUKI, TAKASHI;NAKAZAWA, FUMIHIKO;SANO, SATOSHI;TAKAHASHI, YUJI |
发明人 |
KATSUKI, TAKASHI;NAKAZAWA, FUMIHIKO;SANO, SATOSHI;TAKAHASHI, YUJI |
| 分类号 |
G06F3/033;H01L41/047;H01L41/22;(IPC1-7):H01L41/107;G06F3/03 |
主分类号 |
G06F3/033 |
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