| 摘要 |
PURPOSE: A bit of ashing equipment is provided to prevent a reflective member of a sensing device from being etched due to repeated ashing processes by reinforcing the material of the reflective member. CONSTITUTION: A bit of ashing equipment includes a body, a boat, a loading part, a reflective member, and a photosensor. The body(10) is used for performing an ashing process. The boat for loading a wafer(W) is inserted in the body. The loading part loads the boat. The reflective member(44) is installed on a front surface of the boat. The photosensor(41) is installed on the body corresponding to the reflective member. The photosensor includes a light emitting part(42) and a light receiving part(43). The reflective member is made of opaque quartz.
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