发明名称 DROPLET DISCHARGING APPARATUS, ELECTRO-OPTICAL DEVICE PRODUCTION METHOD, ELECTRO-OPTICAL DEVICE, ELECTRONIC DEVICE, AND SUBSTRATE
摘要 <p><P>PROBLEM TO BE SOLVED: To keep the discharge precision of a functional liquid even when the size of a work is changed by the change of temperature and to easily eliminate the dislocation of a discharge position associated with the relative movement of a functional liquid discharging head and/or the work. <P>SOLUTION: A droplet discharging apparatus has a linear encoder detecting the relative moving positions of the functional liquid discharging head 5 and the work W and a driving/controlling means driving/controlling the discharge of the functional liquid from a nozzle row 6 based on the detection results of the linear encoder. The linear encoder is composed of a linear scale 52 comprising a plurality of mark rows 52a marked in parallel in the direction parallel to one side end part of the work or in the direction perpendicular to the direction and a plurality of linear sensors 51 facing the mark rows. The driving/controlling means corrects the discharge timing of each nozzle 5a based on the dislocation of the output of the linear sensors. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p>
申请公布号 JP2004337727(A) 申请公布日期 2004.12.02
申请号 JP20030136481 申请日期 2003.05.14
申请人 SEIKO EPSON CORP 发明人 MIZUTANI SEIGO
分类号 B41J2/01;B05C5/00;B05C11/10;B05D7/00;G02B5/20;G02F1/13;G09F9/30;H01L51/50;H05B33/10;H05B33/14;(IPC1-7):B05C5/00 主分类号 B41J2/01
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