SUBSTRATE WITH MULTILAYER SURFACE, AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a super-hardness multilayer film formed by utilizing an alternating stress field caused by thermal mismatch and to provide its manufacturing method. SOLUTION: A substrate is provided which has a multilayer surface formed by alternately stacking (a) a ceramic layer having 2 to 30 nm thickness and low thermal expansion coefficient and (b) a ceramic layer having a high thermal expansion coefficient on the substrate. A method for manufacturing the substrate is also mentioned. COPYRIGHT: (C)2005,JPO&NCIPI