| 摘要 |
PROBLEM TO BE SOLVED: To provide a movable stage generating a large driving force by suppressing disturbance of magnetic field and exhibiting high positional stability under stationary state. SOLUTION: A first stage is disposed in a vacuum container inside of which can be evacuated. The first stage is supported to move linearly in the first direction and fixed with a second stage. The second stage is supported to move linearly in the second direction intersecting the first direction with respect to the first stage. A motion converting mechanism is fixed to the first stage and includes a rotary shaft and a linear motion member coming into sliding or rolling contact with each other. The linear motion member moves linearly through rotation of the rotary shaft to cause linear motion of the second stage in the second direction. An air motor rotates the rotary shaft. COPYRIGHT: (C)2005,JPO&NCIPI |
