| 摘要 |
PROBLEM TO BE SOLVED: To provide a linear motor having a large driving force, a high efficiency and a small vertical force. SOLUTION: The linear motor comprises an armature 13 including two opposing magnet tracks 11 and 12, and three open coil sets. A stage, especially a mask stage, can be driven in a lithographic projector using the linear motor. COPYRIGHT: (C)2005,JPO&NCIPI |
