| 摘要 |
PROBLEM TO BE SOLVED: To precisely make positioning when a first substrate and a second substrate are overlapped. SOLUTION: A transparent substrate 11 out of the first and the second substrates 11, 21 is adhered to a substrate holding member 42 fitted on a top plate 41c of the case 41 through a transparent window 43, and a substrate heating means 46 is fitted on the uppermost stage (91) or inside the uppermost stage (91)of a substrate positioning stage assembly 50 installed in the case 41. Then, the other substrate 21 is adhered on the substrate heating means 46 and the substrate positioning stage assembly 50 is displaced in three-dimensional direction and the other substrate 21 is overlapped on the one substrate 11. Then, through the transparent window 43 and the transparent substrate 11, the positioning of the other substrate 21 against the one substrate 11 is observed by a substrate position observation means 44 installed above the transparent window 43. COPYRIGHT: (C)2005,JPO&NCIPI
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