| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an X-ray foreign matter position detection device and an X-ray foreign matter position detection method that are appropriate as an application to industrial applications, such as the inline inspection of an article, can reduce manufacturing costs, and can improve yields. <P>SOLUTION: The X-ray foreign matter position detection device comprises an X-ray source 2 for irradiating an object 5 to be inspected with X rays; imaging equipment 3 for imaging a transmission state inside the object 5 to be inspected in X rays; a conveying means 6 for conveying the object 5 to be inspected in a specific direction; and a position specifying means for specifying the three-dimensional position of foreign matters in the object 5 to be inspected. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
