| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser beam stabilization method and a laser beam generator which make it possible to change a resonator length, make it possible to correct variation of the property of the laser beam, and can obtain long term stability. SOLUTION: The laser beam generator 20 is constituted which is provided with a solid state laser generator excited by excitation light, and a Q switch for pulsing the laser oscillation by using saturable absorber, and constitution which can change an optical length of a laser resonator. To the laser beam generator 20, a pulse of the generated laser beam L2 is detected, and the laser beam is stabilized by controlling the change of the optical length of the laser resonator based on the detected pulse property. In the laser beam generator 20, a resonator length adjustment means for changing the optical length of the laser resonator and a detection means 26 for detecting output pulse laser beam are installed, the optical length of the laser resonator is adjusted by the resonator length adjustment means, based on the pulse property detected by the detection means 26. COPYRIGHT: (C)2005,JPO&NCIPI |
