| 摘要 |
PROBLEM TO BE SOLVED: To perform not only galvano-scanner stabilization time setting or fθlens distortion correction but also correction under the consideration of a locus where the galvano-scanner moves to a target position. SOLUTION: The same object as an object to be worked is actually worked in the same working procedure, and a deviation between a commanded position and an real working position is calculated, and the commanded position to the actual object to be worked is corrected so that the deviation can be dissolved. COPYRIGHT: (C)2005,JPO&NCIPI
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