| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a magnetostrictive torque sensor having small hysteresis and capable of improving steering feeling of the electric power steering device, and an electric power steering device loaded with the magnetostrictive torque sensor. SOLUTION: This method comprises a magnetostrictive film deposition process for providing magnetostrictive films 12, 13 on a rotating shaft 109b, a torque application high-frequency heating process for heating as long as a prescribed time by high-frequency heating in the state where a prescribed torsional torque is applied to the rotating shaft 109b, a torque release process for providing magnetic anisotropy to the magnetostrictive films 12, 13 by releasing the torsional torque, and a coil arrangement process for arranging a multiplex winding coil for detecting the change of a magnetostrictive characteristic around the magnetostrictive films. COPYRIGHT: (C)2005,JPO&NCIPI
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