| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a molding die made of glassy carbon in which a fine pattern of an arbitrary shape can be formed easily at a low cost without biting when the silica glass is press formed. <P>SOLUTION: In the method for manufacturing the molding die for silica glass, a base material for the molding die made of glassy carbon is prepared, then an arbitrary fine pattern is formed, wherein the faces in the depth direction have angles of ≤80° with respect to the forming surface, on the surface of the base material for the molding die by electric discharge machining, and process contamination is eliminated by subjecting the base material to high temperature heat treatment at a temperature higher than the molding temperature in a halogen atmosphere. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
