摘要 |
<P>PROBLEM TO BE SOLVED: To provide a semiconductor acceleration sensor for detecting acceleration in a direction in parallel with the surface of a diaphragm even if excessive force is applied in a direction vertical to the surface of the diaphragm. <P>SOLUTION: The semiconductor acceleration sensor 10 is composed, where a projection 164 that is fixed at a position with a specific gap from the center surface of the diaphragm 13 and projects opposite to the center section of the diaphragm 13 is provided at the other surface side of the diaphragm 13. When at least specific force is applied by acceleration generated vertically to the surface of the diaphragm 13, the displacement of the diaphragm 13 is limited by the projection 164 although the diaphragm 13 is distorted and extended in a direction, where force operates, so that the diaphragm 13 is not extended to the maximum, and the position of a heavy weight 15 is displaced with the top of the projection 164 as a support, thus detecting acceleration in parallel with the surface of the diaphragm 13. <P>COPYRIGHT: (C)2005,JPO&NCIPI |