| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of easily manufacturing a surface acoustic wave element which maintains an electromechanical coupling coefficient of a piezoelectric board and improves the frequency-temperature characteristics. <P>SOLUTION: A piezoelectric board 10 and a support board 20 are washed to remove impurities X1, X2 on bonding surfaces and dries up, at least one boding surface is irradiated with an inert gas or an ion beam of oxygen, a neutralized beam or plasma, etc., to remove remaining impurities X11, X21 and activate the surface layer, and then the piezoelectric board 10 and the support board 20 are bonded to each other with the activated bonding surfaces face to face. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
